{"title":"等离子体处理装置的流体PIC模拟","authors":"G. Lapenta, J. Brackbill","doi":"10.1109/PLASMA.1994.588745","DOIUrl":null,"url":null,"abstract":"complexity of the structure. So far, several numerical models have been reported concerning the EM models of ICPS[’]. The numerical solutions could not describe the physical insight of EM fields and a considerable amount of consumed CPU time could have been expected. We used the Mode Analysis Technique (MAT) to obtain a closedform solution, which provided the behaviors of each mode excited in the ICPS and the relationship between eigenmodes and the reactor geometry.","PeriodicalId":254741,"journal":{"name":"Proceedings of 1994 IEEE 21st International Conference on Plasma Sciences (ICOPS)","volume":"52 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1994-06-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Fluid PIC Simulation Of Plasma Processing Devices\",\"authors\":\"G. Lapenta, J. Brackbill\",\"doi\":\"10.1109/PLASMA.1994.588745\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"complexity of the structure. So far, several numerical models have been reported concerning the EM models of ICPS[’]. The numerical solutions could not describe the physical insight of EM fields and a considerable amount of consumed CPU time could have been expected. We used the Mode Analysis Technique (MAT) to obtain a closedform solution, which provided the behaviors of each mode excited in the ICPS and the relationship between eigenmodes and the reactor geometry.\",\"PeriodicalId\":254741,\"journal\":{\"name\":\"Proceedings of 1994 IEEE 21st International Conference on Plasma Sciences (ICOPS)\",\"volume\":\"52 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1994-06-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of 1994 IEEE 21st International Conference on Plasma Sciences (ICOPS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/PLASMA.1994.588745\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of 1994 IEEE 21st International Conference on Plasma Sciences (ICOPS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/PLASMA.1994.588745","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
complexity of the structure. So far, several numerical models have been reported concerning the EM models of ICPS[’]. The numerical solutions could not describe the physical insight of EM fields and a considerable amount of consumed CPU time could have been expected. We used the Mode Analysis Technique (MAT) to obtain a closedform solution, which provided the behaviors of each mode excited in the ICPS and the relationship between eigenmodes and the reactor geometry.