微电子系统中的微分热膨胀

B. Royce
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引用次数: 22

摘要

微电子系统中使用的结构,从单个器件级到完整的印刷电路板(pcb)的大小不等,涉及陶瓷,金属和聚合物材料的密切物理接触。正常工作期间的热循环会在各种材料界面产生热疲劳,导致缺陷扩展,并直接或通过随后的环境退化导致结构过早失效。作者通过从微电子系统的每个“封装级别”的例子来回顾这个技术上重要的问题。使用的例子包括硅氧化和GaAs-on-silicon异质外延,陶瓷或聚合物封装的制造结构,pcb,以及在pcb上安装组件时使用的焊料连接。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Differential thermal expansion in microelectronic systems
Structures used in microelectronics systems, ranging in size from the individual device level to complete printed circuit boards (PCBs) involve ceramic, metallic and polymeric materials in intimate physical contact. Thermal cycling during normal operation can give rise to thermal fatigue at the various material interfaces, cause defect propagation, and lead to premature failure of the structures, either directly or through subsequent environmental degradation. The author reviews this technologically important problem by taking examples from each of the 'packaging levels' of microelectronic systems. The examples used include silicon oxidation and GaAs-on-silicon heteroepitaxy, ceramic or polymeric encapsulants of fabricated structures, PCBs, and on the solder connections used in mounting components on PCBs.<>
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