化学气相沉积碳纳米管的拉曼和形态特征随衬底温度的变化

P. Guo, Z. Sun, T. Chen, M. Xu, Z. Zheng, Y. Sun
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引用次数: 0

摘要

以镍为催化剂,采用氢-乙炔混合物热化学气相沉积法在低压下合成了碳纳米管(CNTs)薄膜。研究了CNTs在不同衬底温度下的拉曼特性和形貌特征。CNTs形态特征的变化主要取决于衬底温度。在低温范围内(450-550℃),薄膜由石墨颗粒和CNTs混合组成,并带有非晶态相。随着温度的升高(550 ~ 650℃),管材含量增加,管径减小。在高温范围内(700-800℃),薄膜由CNTs和纳米颗粒混合物组成。拉曼光谱结果表明,在介质温度为600℃时,G带和d带的强度比ID/IG最大,G带宽度随着衬底温度的升高而变窄。根据实验结果,讨论了CNTs在不同温度下的生长行为。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Raman and morphological characteristics of carbon nanotubes depending on substrate temperatures by chemical vapor deposition
Carbon nanotubes (CNTs) films were synthesized at low pressure using nickel as catalyst by thermal chemical vapor deposition with hydrogen-acetylene mixture. The Raman characteristics and morphological features of CNTs at different substrate temperatures were investigated. The variation of CNTs morphological feature mainly depends on the substrate temperatures. In the low temperature range (450-550degC), the film consists of graphite particles and CNTs mixture with some amorphous phase. With increase the temperature (550-650degC), the tube content increases, and the tube diameter decreases. At high temperature range (700-800degC), the film consists of CNTs and nanoparticles mixture. Raman spectroscopy results show that the intensity ratio ID/IG of the G- and D-band has a maximum at the medium temperature of 600degC, and the width of G band becomes narrow with the substrate temperature. The growth behaviors of CNTs at different temperatures are discussed based on the experimental results.
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