高频应用的RingFET架构:基于TCAD的评估

V. Kumari, M. Saxena, Mridula Gupta
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引用次数: 6

摘要

在这项工作中,基于TCAD的RingFET结构研究已用于高频应用。利用ATLAS TCAD器件仿真软件开发了RingFET的性能,并与等效的大块MOSFET进行了比较。参数包括:截止频率,最大值。对换能器功率增益、斯特恩稳定系数、单边功率增益、散射参数和寄生电容(即Cgs和Cgd)进行了评估。在32nm通道长度下,RingFET(具有漏极外)结构实现了3.7太赫兹的最大截止频率。随着衬底掺杂的减少、栅极功函数的减小和栅极电压的提高,可以获得更高的截止频率。由于RingFET结构的不对称特性,与RingFET的漏极外部相比,在漏极内部(即3.4 THz)可以观察到较低的截止频率。此外,与RingFET中的栅极到源极电容Cgd相比,衬底掺杂后栅极到漏极电容Cgd的变化更高。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
RingFET Architecture for High Frequency Applications: TCAD based Assessment
In this work, TCAD based investigation of RingFET architecture has been carried for high frequency applications. ATLAS TCAD device simulation software has been used to exploits the RingFET performance and are also compared with the equivalent bulk MOSFET. Parameters such as: cut-off frequency, max. transducer power gain, Stern Stability factor, Unilateral power gain, scattering parameters and parasitic capacitance (i.e. Cgs and Cgd)are evaluated. Maximum cut-off frequency of 3.7 THz has been achieved with RingFET (having drain outside)architecture at 32nm channel length. With the reduction in substrate doping, gate workfunction and enhancement in gate voltage, superior cut-off frequency can be achieved. Due to asymmetric nature of RingFET architecture, lower cut-off frequency is observed for drain inside case (i.e. 3.4 THz)compared to drain outside case of RingFET. Also, the change in gate to source capacitance Cgs with substrate doping is higher in comparison to gate to drain capacitance Cgd in RingFET.
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