应力约束下波纹柔性单元二自由度定位平台的优化设计

Nianfeng F. Wang, F. Yue, Canran Li, Xianmin Zhang
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引用次数: 1

摘要

本文介绍了在应力约束下,采用波纹柔性单元进行微定位台的优化设计。求解了应力状态,推导了应力约束下的最大位移。根据刚度矩阵的计算结果,进一步推导出微定位台的固有频率公式。最后,通过限制离轴/轴向刚度比和级阶固有频率,优化了最大位移对应的级阶构型。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Optimization of a 2DOF Positioning Stage Using Corrugated Flexure Units Under Stress Constraints
The paper introduces the design optimization for micro-positioning stage using corrugated flexure (CF) units under stress constraints. The stress state is solved and the maximum displacement under stress constraints is deduced. The natural frequency formula of the micro-positioning stage is further derived from the results of the stiffness matrix. Finally, the stage configurations corresponding to the maximum displacement are optimized by restricting the off-axis/axial stiffness ratio and natural frequency of the stage.
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