准分子激光烧蚀和离子注入制备光折变波导的研究

K. Youden, R. Eason, M. Gower
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引用次数: 0

摘要

光折变材料的薄膜光波导的制造在集成光学的应用中是特别需要的。由于波导内的光约束,导波强度-长度乘积可以比块状介质中大得多,这也是令人感兴趣的。因此,增加的强度-长度产品可以允许比散装更快的响应时间(通常是≈103- 104的因数)。通过射频溅射、闪蒸、分子束外延和液相外延等多种技术可以制备晶体薄膜。然而,所生长的薄膜往往是不正确的(或可变的)组成和相位,很少有良好的光学质量。本文讨论了在几种不同的光折变材料中制备光波导的两种方法。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Investigation of Photorefractive Waveguides Fabricated by Excimer Laser Ablation and Ion-Implantation
The fabrication of thin films optical waveguides of photorefractive materials is particularly desirable for applications in integrated optics. It is also of interest because the guided-wave intensity-length product can be considerably larger than in bulk media because of the optical confinement within the waveguide. The increased intensity-length product may therefore allow much faster response times than in the bulk (typically by a factor of ≈103-l04). Thin crystalline films can be fabricated by a variety of techniques such as RF sputtering, flash evaporation, molecular beam epitaxy and liquid phase epitaxy. However, the films grown are often of the incorrect (or variable) composition and phase and are rarely of good optical quality. We discuss here two methods that we have investigated for producing optical waveguides in several different photorefractive materials.
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