ECR等离子体氧化制备Co-/spl γ / Fe/sub 2/O/sub 3/ NiO薄膜介质的方法

{"title":"ECR等离子体氧化制备Co-/spl γ / Fe/sub 2/O/sub 3/ NiO薄膜介质的方法","authors":"S. Yamamoto, T. Santoki, H. Kurisu, M. Matsuura, J. Koujima, K. Nakata, Y. Kakihara, T. Do, K. Tamari","doi":"10.1109/INTMAG.1999.837242","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":425017,"journal":{"name":"IEEE International Magnetics Conference","volume":"225 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1999-05-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Preparation method of Co-/spl gamma/ Fe/sub 2/O/sub 3//NiO thin film media using ECR plasma oxidization\",\"authors\":\"S. Yamamoto, T. Santoki, H. Kurisu, M. Matsuura, J. Koujima, K. Nakata, Y. Kakihara, T. Do, K. Tamari\",\"doi\":\"10.1109/INTMAG.1999.837242\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":425017,\"journal\":{\"name\":\"IEEE International Magnetics Conference\",\"volume\":\"225 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1999-05-18\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE International Magnetics Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/INTMAG.1999.837242\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE International Magnetics Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/INTMAG.1999.837242","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}