二轴电热MEMS微镜的热动力学

2019 International Conference on Optical MEMS and Nanophotonics (OMN) Pub Date : 2019-07-01 DOI:10.1109/OMN.2019.8925050

Mark Donnachie, D. Uttamchandani, R. Bauer

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引用次数: 0

摘要

我们提出了一个2轴电热MEMS扫描仪的动态分析，重点是随机存取成像的阶跃响应时间。在0.4°-4.7°角度变化范围内，1.2 mm直径单层硅反射镜的上升时间在10-40 ms范围内，而下降时间在5-15 ms范围内，这为反射镜路径规划的高级优化提供了潜力。

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Thermal dynamics of 2-axis electrothermal MEMS micromirrors

We present the dynamic analysis of a 2-axis electrothermal MEMS scanner, focusing on the step response times for random access imaging. The 1.2 mm diameter single layer silicon mirror shows rise times in the 10-40 ms range for angle changes of 0.4°-4.7°, while fall times are 5-15 ms for the same range, leading to the potential of advanced optimization for mirror path planning.

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2019 International Conference on Optical MEMS and Nanophotonics (OMN)

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