面内拉伸和厚度压缩与弯曲耦合对BAW加速度灵敏度下界的影响

Proceedings of the 2000 IEEE/EIA International Frequency Control Symposium and Exhibition (Cat. No.00CH37052) Pub Date : 2000-06-07 DOI:10.1109/FREQ.2000.887379

J. Kosinski, R. A. Pastore, Jia-shi Yang

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引用次数: 7

摘要

众所周知，对于理想的、对称安装的体声波谐振器，受某些类型的变形影响，加速度引起的频移会消失。我们在这里表明，加速度引起的频移不会消失，并且对于以前未考虑的某些变形不是微不足道的。

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Implications of in-plane stretch and thickness compression coupled to flexure on the lower bound of BAW acceleration sensitivity

It is known that the acceleration-induced frequency shift vanishes for an ideal, symmetrically mounted bulk acoustic wave resonator subjected to certain types of deformations. We show here that the acceleration-induced frequency shift does not vanish and is not insignificant for certain deformations previously unconsidered.

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Proceedings of the 2000 IEEE/EIA International Frequency Control Symposium and Exhibition (Cat. No.00CH37052)

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