信号形式对PZT薄膜电容器疲劳性能的影响

2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics Pub Date : 2007-05-27 DOI:10.1109/ISAF.2007.4393170

D. Brauhaus, P. Schorn, U. Bottger, R. Waser

{"title":"信号形式对PZT薄膜电容器疲劳性能的影响","authors":"D. Brauhaus, P. Schorn, U. Bottger, R. Waser","doi":"10.1109/ISAF.2007.4393170","DOIUrl":null,"url":null,"abstract":"Fatigue is a commonly known failure mechanism in Pt/PZT/Pt thin film capacitors. The remnant polarization shows a fast drop after 105 to 106 bipolar switching cycles. The reason for this loss of switchable polarization is mainly unknown. We studied the influence of the used switching signal, especially the influence of its shape. A great number of fatigue measurements had to be taken to get reliable data. In order to reduce the measuring time a way to extrapolate the fatigue curve by one decade is introduced and show to be accurate with an error of below 1%. It is also shown that the leading edge of the switching signal has an influence on the fatigue behavior of Pt/PZT/Pt thin films.","PeriodicalId":321007,"journal":{"name":"2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics","volume":"153 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2007-05-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Signal Form Influences on the Fatigue Behavior of PZT Thin Film Capacitors\",\"authors\":\"D. Brauhaus, P. Schorn, U. Bottger, R. Waser\",\"doi\":\"10.1109/ISAF.2007.4393170\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Fatigue is a commonly known failure mechanism in Pt/PZT/Pt thin film capacitors. The remnant polarization shows a fast drop after 105 to 106 bipolar switching cycles. The reason for this loss of switchable polarization is mainly unknown. We studied the influence of the used switching signal, especially the influence of its shape. A great number of fatigue measurements had to be taken to get reliable data. In order to reduce the measuring time a way to extrapolate the fatigue curve by one decade is introduced and show to be accurate with an error of below 1%. It is also shown that the leading edge of the switching signal has an influence on the fatigue behavior of Pt/PZT/Pt thin films.\",\"PeriodicalId\":321007,\"journal\":{\"name\":\"2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics\",\"volume\":\"153 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2007-05-27\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISAF.2007.4393170\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISAF.2007.4393170","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 2

摘要

疲劳是Pt/PZT/Pt薄膜电容器常见的失效机制。在105 ~ 106个双极开关循环后，残余极化呈现出快速下降的趋势。这种可切换极化损失的原因主要是未知的。我们研究了所用开关信号的影响，特别是开关信号形状的影响。为了获得可靠的数据，必须进行大量的疲劳测量。为了缩短测量时间，提出了一种将疲劳曲线外推10年的方法，并证明了该方法的准确性，误差在1%以下。开关信号的前沿对Pt/PZT/Pt薄膜的疲劳性能也有影响。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Signal Form Influences on the Fatigue Behavior of PZT Thin Film Capacitors

Fatigue is a commonly known failure mechanism in Pt/PZT/Pt thin film capacitors. The remnant polarization shows a fast drop after 105 to 106 bipolar switching cycles. The reason for this loss of switchable polarization is mainly unknown. We studied the influence of the used switching signal, especially the influence of its shape. A great number of fatigue measurements had to be taken to get reliable data. In order to reduce the measuring time a way to extrapolate the fatigue curve by one decade is introduced and show to be accurate with an error of below 1%. It is also shown that the leading edge of the switching signal has an influence on the fatigue behavior of Pt/PZT/Pt thin films.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics

自引率

0.00%

发文量