G. Torelly, R. Jakomin, M. Pires, L. Dornelas, R. Prioli, P. G. Caldas, H. Xie, F. Ponce, P. L. Souza
{"title":"从扩展单层平面二维梯田到生长在砷化镓衬底上的三维岛屿","authors":"G. Torelly, R. Jakomin, M. Pires, L. Dornelas, R. Prioli, P. G. Caldas, H. Xie, F. Ponce, P. L. Souza","doi":"10.1109/SBMICRO.2015.7298133","DOIUrl":null,"url":null,"abstract":"The formation of self-assembled InAs quantum dots is investigated as the growth time increases from 3.6 to 12 seconds at a low growth rate. The morphological evolution from a rough surface at a short length scale to an extended 2D InAs flat area, and finally to the 3D InAs islands is followed using atomic force microscopy, photoluminescence and transmission electron microscopy. We show that micrometer long terraces with 2 and 3 monolayers thicknesses can co-exist even though 3 monolayers is beyond the critical thickness. As the quantum dots are nucleated the 3 monolayers thick terrace is depleted by the 3D islands.","PeriodicalId":342493,"journal":{"name":"2015 30th Symposium on Microelectronics Technology and Devices (SBMicro)","volume":"44 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"From InAs extended monolayer flat 2D terraces to 3D islands grown on GaAs substrates\",\"authors\":\"G. Torelly, R. Jakomin, M. Pires, L. Dornelas, R. Prioli, P. G. Caldas, H. Xie, F. Ponce, P. L. Souza\",\"doi\":\"10.1109/SBMICRO.2015.7298133\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The formation of self-assembled InAs quantum dots is investigated as the growth time increases from 3.6 to 12 seconds at a low growth rate. The morphological evolution from a rough surface at a short length scale to an extended 2D InAs flat area, and finally to the 3D InAs islands is followed using atomic force microscopy, photoluminescence and transmission electron microscopy. We show that micrometer long terraces with 2 and 3 monolayers thicknesses can co-exist even though 3 monolayers is beyond the critical thickness. As the quantum dots are nucleated the 3 monolayers thick terrace is depleted by the 3D islands.\",\"PeriodicalId\":342493,\"journal\":{\"name\":\"2015 30th Symposium on Microelectronics Technology and Devices (SBMicro)\",\"volume\":\"44 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-08-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2015 30th Symposium on Microelectronics Technology and Devices (SBMicro)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SBMICRO.2015.7298133\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 30th Symposium on Microelectronics Technology and Devices (SBMicro)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SBMICRO.2015.7298133","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
From InAs extended monolayer flat 2D terraces to 3D islands grown on GaAs substrates
The formation of self-assembled InAs quantum dots is investigated as the growth time increases from 3.6 to 12 seconds at a low growth rate. The morphological evolution from a rough surface at a short length scale to an extended 2D InAs flat area, and finally to the 3D InAs islands is followed using atomic force microscopy, photoluminescence and transmission electron microscopy. We show that micrometer long terraces with 2 and 3 monolayers thicknesses can co-exist even though 3 monolayers is beyond the critical thickness. As the quantum dots are nucleated the 3 monolayers thick terrace is depleted by the 3D islands.