Binal P Bruno, A. Treffer, R. Grunwald, U. Wallrabe
{"title":"热驱动的自由形式MEMS反射镜","authors":"Binal P Bruno, A. Treffer, R. Grunwald, U. Wallrabe","doi":"10.1109/OMN.2019.8925090","DOIUrl":null,"url":null,"abstract":"Quasi-non-diffracting beams are used in a wide range of applications because of their ability to localize the radiation energy in narrow spatial and angular distributions. We present the development of free-form tunable MEMS mirrors to generate non-diffracting beams with unique spatial profiles. The mirror surface defined by a polynomial function is produced by shape optimization of a mold for subsequent molding profiting explicitly from a well-defined volume shrinkage. The actuation is achieved by thermal expansion of a polymer layer, which defines the final tuned shape of the mirror. The deflection of the mirror surface and the resulting iry beam is characterized.","PeriodicalId":353010,"journal":{"name":"2019 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"43 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Thermally actuated free-form MEMS mirrors\",\"authors\":\"Binal P Bruno, A. Treffer, R. Grunwald, U. Wallrabe\",\"doi\":\"10.1109/OMN.2019.8925090\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Quasi-non-diffracting beams are used in a wide range of applications because of their ability to localize the radiation energy in narrow spatial and angular distributions. We present the development of free-form tunable MEMS mirrors to generate non-diffracting beams with unique spatial profiles. The mirror surface defined by a polynomial function is produced by shape optimization of a mold for subsequent molding profiting explicitly from a well-defined volume shrinkage. The actuation is achieved by thermal expansion of a polymer layer, which defines the final tuned shape of the mirror. The deflection of the mirror surface and the resulting iry beam is characterized.\",\"PeriodicalId\":353010,\"journal\":{\"name\":\"2019 International Conference on Optical MEMS and Nanophotonics (OMN)\",\"volume\":\"43 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-07-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2019 International Conference on Optical MEMS and Nanophotonics (OMN)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMN.2019.8925090\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 International Conference on Optical MEMS and Nanophotonics (OMN)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMN.2019.8925090","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Quasi-non-diffracting beams are used in a wide range of applications because of their ability to localize the radiation energy in narrow spatial and angular distributions. We present the development of free-form tunable MEMS mirrors to generate non-diffracting beams with unique spatial profiles. The mirror surface defined by a polynomial function is produced by shape optimization of a mold for subsequent molding profiting explicitly from a well-defined volume shrinkage. The actuation is achieved by thermal expansion of a polymer layer, which defines the final tuned shape of the mirror. The deflection of the mirror surface and the resulting iry beam is characterized.
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