{"title":"行波管场发射阵列的研究","authors":"Xinghui Li, Fujiang Liao, M. Ding, Guodong Bai, Fuquan Zhang, Jinjun Feng","doi":"10.1109/IVEC.2003.1286402","DOIUrl":null,"url":null,"abstract":"The Spindle type FEAs were fabricated using n-type silicon wafers with different resistivities. The I-V measurements and emission characteristics of FEAs made from high resistivity wafers indicated that the emission performance was greatly improved. The FEAs were coated with a thin layer of nanocrystalline diamond film (NCD) using microwave plasma chemical vapour deposition (MPCVD). Scanning electron microscopy (SEM) observations of FEAs were made before coating NCD and after coating NCD.","PeriodicalId":203178,"journal":{"name":"4th IEEE International Conference on Vacuum Electronics, 2003","volume":"143 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2003-05-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Study of field emission arrays for travelling wave tubes\",\"authors\":\"Xinghui Li, Fujiang Liao, M. Ding, Guodong Bai, Fuquan Zhang, Jinjun Feng\",\"doi\":\"10.1109/IVEC.2003.1286402\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The Spindle type FEAs were fabricated using n-type silicon wafers with different resistivities. The I-V measurements and emission characteristics of FEAs made from high resistivity wafers indicated that the emission performance was greatly improved. The FEAs were coated with a thin layer of nanocrystalline diamond film (NCD) using microwave plasma chemical vapour deposition (MPCVD). Scanning electron microscopy (SEM) observations of FEAs were made before coating NCD and after coating NCD.\",\"PeriodicalId\":203178,\"journal\":{\"name\":\"4th IEEE International Conference on Vacuum Electronics, 2003\",\"volume\":\"143 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2003-05-28\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"4th IEEE International Conference on Vacuum Electronics, 2003\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IVEC.2003.1286402\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"4th IEEE International Conference on Vacuum Electronics, 2003","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IVEC.2003.1286402","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Study of field emission arrays for travelling wave tubes
The Spindle type FEAs were fabricated using n-type silicon wafers with different resistivities. The I-V measurements and emission characteristics of FEAs made from high resistivity wafers indicated that the emission performance was greatly improved. The FEAs were coated with a thin layer of nanocrystalline diamond film (NCD) using microwave plasma chemical vapour deposition (MPCVD). Scanning electron microscopy (SEM) observations of FEAs were made before coating NCD and after coating NCD.