行波管场发射阵列的研究

Xinghui Li, Fujiang Liao, M. Ding, Guodong Bai, Fuquan Zhang, Jinjun Feng
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引用次数: 0

摘要

采用不同电阻率的n型硅片制备了主轴型有限元分析元件。高电阻率晶圆制备的FEAs的I-V测量和发射特性表明,其发射性能得到了很大的改善。采用微波等离子体化学气相沉积(MPCVD)技术在FEAs表面包裹一层纳米晶金刚石薄膜(NCD)。分别对涂层前和涂层后的FEAs进行了扫描电镜(SEM)观察。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Study of field emission arrays for travelling wave tubes
The Spindle type FEAs were fabricated using n-type silicon wafers with different resistivities. The I-V measurements and emission characteristics of FEAs made from high resistivity wafers indicated that the emission performance was greatly improved. The FEAs were coated with a thin layer of nanocrystalline diamond film (NCD) using microwave plasma chemical vapour deposition (MPCVD). Scanning electron microscopy (SEM) observations of FEAs were made before coating NCD and after coating NCD.
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