用于wSMA的金属网红外滤波器

Chao-Te Li, C. Tong, Ming-jye Wang, Tse-Jun Chen, Yen-Pin Chang, S. Yen, Jen-Chieh Cheng, Wei-Chun Lu, Yen-Ru Huang
{"title":"用于wSMA的金属网红外滤波器","authors":"Chao-Te Li, C. Tong, Ming-jye Wang, Tse-Jun Chen, Yen-Pin Chang, S. Yen, Jen-Chieh Cheng, Wei-Chun Lu, Yen-Ru Huang","doi":"10.1117/12.2561174","DOIUrl":null,"url":null,"abstract":"Since the start of full science operations from 2004, the Submillimeter Array has been implementing plans to expand IF bandwidths and upgrade receivers and cryostats. Metal mesh low-pass filters were designed to block infrared (IR) radiation to reduce the thermal load on the cryostats. Filters were fabricated on a quartz wafer through photolithography and coated with anti-reflection (AR) material. The filters were tested from 200 to 400 GHz to verify their passband performances. The measurement results were found to be in good agreement with EM simulation results. They were tested in the far-infrared (FIR) frequency range to verify out-of-band rejection. The IR reflectivity was found to be approximately 70%, which corresponded to the percentage of the area blocked by metal.","PeriodicalId":393026,"journal":{"name":"Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy X","volume":"26 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2020-12-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Metal mesh IR filter for wSMA\",\"authors\":\"Chao-Te Li, C. Tong, Ming-jye Wang, Tse-Jun Chen, Yen-Pin Chang, S. Yen, Jen-Chieh Cheng, Wei-Chun Lu, Yen-Ru Huang\",\"doi\":\"10.1117/12.2561174\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Since the start of full science operations from 2004, the Submillimeter Array has been implementing plans to expand IF bandwidths and upgrade receivers and cryostats. Metal mesh low-pass filters were designed to block infrared (IR) radiation to reduce the thermal load on the cryostats. Filters were fabricated on a quartz wafer through photolithography and coated with anti-reflection (AR) material. The filters were tested from 200 to 400 GHz to verify their passband performances. The measurement results were found to be in good agreement with EM simulation results. They were tested in the far-infrared (FIR) frequency range to verify out-of-band rejection. The IR reflectivity was found to be approximately 70%, which corresponded to the percentage of the area blocked by metal.\",\"PeriodicalId\":393026,\"journal\":{\"name\":\"Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy X\",\"volume\":\"26 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-12-13\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy X\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2561174\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy X","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2561174","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0

摘要

自2004年开始全面科学运作以来,亚毫米波阵列一直在实施扩大中频带宽和升级接收器和低温恒温器的计划。设计了金属网低通滤波器来阻挡红外辐射,以减少低温恒温器的热负荷。采用光刻技术在石英晶片上制备滤光片,并涂覆增透材料。在200至400 GHz频段对滤波器进行了测试,以验证其通带性能。测量结果与仿真结果吻合较好。它们在远红外(FIR)频率范围内进行了测试,以验证带外抑制。红外反射率约为70%,这与金属阻挡面积的百分比相对应。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Metal mesh IR filter for wSMA
Since the start of full science operations from 2004, the Submillimeter Array has been implementing plans to expand IF bandwidths and upgrade receivers and cryostats. Metal mesh low-pass filters were designed to block infrared (IR) radiation to reduce the thermal load on the cryostats. Filters were fabricated on a quartz wafer through photolithography and coated with anti-reflection (AR) material. The filters were tested from 200 to 400 GHz to verify their passband performances. The measurement results were found to be in good agreement with EM simulation results. They were tested in the far-infrared (FIR) frequency range to verify out-of-band rejection. The IR reflectivity was found to be approximately 70%, which corresponded to the percentage of the area blocked by metal.
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