{"title":"石墨纳米针的稳定电子发射及其在扫描电镜上的应用","authors":"T. Matsumoto, Y. Neo, H. Mimura","doi":"10.1109/IVNC.2006.335242","DOIUrl":null,"url":null,"abstract":"The authors demonstrate both the stable and high brightness field emission from graphite nanoneedle (GRANN) cathode fabricated by simple plasma etching of a graphite rod. Bright electron emission of the order of 1012 Asr-1m-2) is obtained from GRANN cathode. As well as the bright emission, a stable emission under high residual pressure (10-5 torr) is obtained by lightly heating the GRANN cathode (Thermal-FE operation). The performance of the GRANN cathode is demonstrated by the construction of an FE scanning electron microscope (SEM) with the GRANN cathode and clear FE-SEM images are obtained at high residual pressure of the order of 10-5 torr","PeriodicalId":108834,"journal":{"name":"2006 19th International Vacuum Nanoelectronics Conference","volume":"12 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Stable Electron Emission from Graphite-Nanoneedles and Their Application to Scanning Electron Microscopes\",\"authors\":\"T. Matsumoto, Y. Neo, H. Mimura\",\"doi\":\"10.1109/IVNC.2006.335242\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The authors demonstrate both the stable and high brightness field emission from graphite nanoneedle (GRANN) cathode fabricated by simple plasma etching of a graphite rod. Bright electron emission of the order of 1012 Asr-1m-2) is obtained from GRANN cathode. As well as the bright emission, a stable emission under high residual pressure (10-5 torr) is obtained by lightly heating the GRANN cathode (Thermal-FE operation). The performance of the GRANN cathode is demonstrated by the construction of an FE scanning electron microscope (SEM) with the GRANN cathode and clear FE-SEM images are obtained at high residual pressure of the order of 10-5 torr\",\"PeriodicalId\":108834,\"journal\":{\"name\":\"2006 19th International Vacuum Nanoelectronics Conference\",\"volume\":\"12 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-07-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2006 19th International Vacuum Nanoelectronics Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IVNC.2006.335242\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2006 19th International Vacuum Nanoelectronics Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IVNC.2006.335242","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Stable Electron Emission from Graphite-Nanoneedles and Their Application to Scanning Electron Microscopes
The authors demonstrate both the stable and high brightness field emission from graphite nanoneedle (GRANN) cathode fabricated by simple plasma etching of a graphite rod. Bright electron emission of the order of 1012 Asr-1m-2) is obtained from GRANN cathode. As well as the bright emission, a stable emission under high residual pressure (10-5 torr) is obtained by lightly heating the GRANN cathode (Thermal-FE operation). The performance of the GRANN cathode is demonstrated by the construction of an FE scanning electron microscope (SEM) with the GRANN cathode and clear FE-SEM images are obtained at high residual pressure of the order of 10-5 torr
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