扫描隧道显微镜功能参数的自动模拟

2016 XII International Conference on Perspective Technologies and Methods in MEMS Design (MEMSTECH) Pub Date : 2016-04-20 DOI:10.1109/MEMSTECH.2016.7507530

Roman Maisakovskyi, K. Kolesnyk, R. Panchak, Ruslan Golovatskyy

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引用次数: 3

摘要

本文讨论了能够获得高空间分辨率表面图像的显微镜悬臂检测方法。分析了扫描隧道显微镜的功能和工作原理。根据模拟数据，可以显示显微镜的操作参数对其测量结果的影响。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Automated simulation of scanning tunneling microscope functional parameters

In this paper cantilever detection methods of microscopy that allow to get an image of surface with high spatial resolution are discussed. The functionality of the scanning tunneling microscope and principle of its operation are analyzed. Basing on the simulated data, it is possible to show how microscope operating parameters affect the results of its measurements.

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来源期刊

2016 XII International Conference on Perspective Technologies and Methods in MEMS Design (MEMSTECH)

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