细线厚膜和LTCC导体在高温下的可靠性

Proceedings of the 2014 37th International Spring Seminar on Electronics Technology Pub Date : 2014-05-07 DOI:10.1109/ISSE.2014.6887587

Damian Nowak, A. Dziedzic

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引用次数: 3

摘要

本文系统地研究了在高达400°C的温度下，利用激光整形技术制成的厚膜或LTCC细线导体。最小尺寸，即导电路径宽度和间距为50 μm。这种小的图案是由激光切割烧制的金或聚苯乙烯基导电薄膜制成的。激光系统采用Nd: yag激光器(光束波长为1064 nm)。此外，部分结构还覆盖了保护性的上釉层。在25°C至400°C的温度范围内，测量和分析了几何性能、电学性能和稳定性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Reliability of fine-line thick-film and LTCC conductors at high-temperature operation

This paper presents systematic studies of thick-film or LTCC fine-line conductors made with the aid of laser-shaping and operating at temperature up to 400°C. The minimum dimensions i.e. conductive path width and spacings were 50 μm. Such small patterns have been created by laser cutting of fired Au- or PdAg-based conductive films. Laser system equipped with Nd:YAG-laser (beam wavelength of 1064 nm) was applied. Additionally, part of the structures was covered with protective overglaze layer. The geometrical as well as electrical and stability properties in temperature range between 25°C and 400°C were measured and analyzed.

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Proceedings of the 2014 37th International Spring Seminar on Electronics Technology

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