{"title":"sio2 / 12oy - x linbo3结构中瑞利波的温度特性","authors":"J. Yin, Wen Wu, D. Zhang, Y. Shui","doi":"10.1109/ULTSYM.1987.198961","DOIUrl":null,"url":null,"abstract":"Y-cut X propagation LiNbO is surface acoustic wave (SAW) devices due to its high electro-mechanical coupling coefficient and low spurious response. But its temperature coefficient of delay (TCD) is large. Yamanouchi et a1 have investigated the propagation characteristics of layered structure consisting of an Si02 film on 128\" Y-X LiNbO3 for SAW. In this paper the temperature dependence of M I € of this layered structure versus h/X for first and second order Rayleigh wave has been further studied theoretically and experimentally.when h/X =0.21, TCD=O occurs at about T=40°C and the variation of Af/f is less than 160 ppm as temperature changes from 40°C to 7OOC. Different film thickness leads to different zero TCD point. Experimental results are in agreement with theoretical predictions.","PeriodicalId":309261,"journal":{"name":"IEEE 1987 Ultrasonics Symposium","volume":"3 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Temperature Characteristics of Rayleigh Wave in SiO2/128oY-X LiNbO3Structure\",\"authors\":\"J. Yin, Wen Wu, D. Zhang, Y. Shui\",\"doi\":\"10.1109/ULTSYM.1987.198961\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Y-cut X propagation LiNbO is surface acoustic wave (SAW) devices due to its high electro-mechanical coupling coefficient and low spurious response. But its temperature coefficient of delay (TCD) is large. Yamanouchi et a1 have investigated the propagation characteristics of layered structure consisting of an Si02 film on 128\\\" Y-X LiNbO3 for SAW. In this paper the temperature dependence of M I € of this layered structure versus h/X for first and second order Rayleigh wave has been further studied theoretically and experimentally.when h/X =0.21, TCD=O occurs at about T=40°C and the variation of Af/f is less than 160 ppm as temperature changes from 40°C to 7OOC. Different film thickness leads to different zero TCD point. Experimental results are in agreement with theoretical predictions.\",\"PeriodicalId\":309261,\"journal\":{\"name\":\"IEEE 1987 Ultrasonics Symposium\",\"volume\":\"3 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1900-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE 1987 Ultrasonics Symposium\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ULTSYM.1987.198961\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE 1987 Ultrasonics Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ULTSYM.1987.198961","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Temperature Characteristics of Rayleigh Wave in SiO2/128oY-X LiNbO3Structure
Y-cut X propagation LiNbO is surface acoustic wave (SAW) devices due to its high electro-mechanical coupling coefficient and low spurious response. But its temperature coefficient of delay (TCD) is large. Yamanouchi et a1 have investigated the propagation characteristics of layered structure consisting of an Si02 film on 128" Y-X LiNbO3 for SAW. In this paper the temperature dependence of M I € of this layered structure versus h/X for first and second order Rayleigh wave has been further studied theoretically and experimentally.when h/X =0.21, TCD=O occurs at about T=40°C and the variation of Af/f is less than 160 ppm as temperature changes from 40°C to 7OOC. Different film thickness leads to different zero TCD point. Experimental results are in agreement with theoretical predictions.
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