电镀制备高性能Ni-Pd/GaAs肖特基势垒混合二极管

A. Nara, T. Ishii, H. Ikegawa, S. Mitsui, K. Shirahata
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引用次数: 0

摘要

研制了用于SHF接收系统的高截止度、高可靠性肖特基势垒混合二极管。这种电镀技术使其形成肖特基势垒时不会因覆盖而产生杂散电容,也不会因砷化镓表面氧化和污染而增加串联电阻,从而实现2000 GHz (DC)以上的高截止频率。Ni-Pd/GaAs的肖特基势垒也很稳定。例如,在60°C时,推导出了7.5 × 107小时的MITF,比传统的Ni/GaAs肖特基势垒长三个数量级。在SHF下变频器中使用该混频器二极管,在12 GHz频率下,在200 MHz宽度下获得了低至2.9 dB的转换损耗和低至4.3 dB的系统噪声系数。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
High performance Ni-Pd/GaAs Schottky barrier mixer diodes made by electroplating
Electroplating Ni-Pd binary alloy on GaAs, high cutoff and high reliability Schottky barrier mixer diodes for SHF reciever systems have been developed. This electroplating technique enables to form Schottky barrier without stray capacitance due to overlay and without increase of series resistance due to oxidation and contamination of the GaAs surface and thereby to realize high cutoff frequency more than 2000 GHz (DC). The Ni-Pd/GaAs Schottky barrier is also very stable. For instance MITF of 7.5 × 107hours has been deduced at 60°C, which is three orders of magnitude longer than the conventional Ni/GaAs Schottky barrier's. Using this mixer diode in a SHF downconverter, conversion loss as low as 2.9 dB and system noise figure as low as 4.3 dB have been obtained with a 200 MHz width at 12 GHz.
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