用于下一代太赫兹系统的共振隧穿二极管

R. Baba, K. Jacobs, B. Stevens, B. Harrison, Adam P. Watt, T. Mukai, R. Hogg
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引用次数: 2

摘要

谐振隧道二极管(rtd)是未来太赫兹频谱(亚毫米波)无线通信的有力候选者,提供紧凑的室温操作,使用单个无线链路,具有超过12G-SDI标准规定的比特传输速率的潜力。描述了一种工作在353GHz的自由空间RTD发射器。制造过程包括使用空气桥的双通道i线光刻和蚀刻技术,允许低电阻率欧姆接触,并精确控制所需的器件面积。在考虑外部电路元件的情况下,分析了半导体本征效率,研究了辐射效率的结构改进。提出了这种优化的结构,然后在商业上可行的金属有机气相外延(MOVPE)反应器外延生长后进行了表征。低温光致发光光谱,x射线衍射和透射电子显微镜的组合证明了新材料的质量。最后,我们建议接下来的步骤要超过技术就绪级别8,并在新系统中使用单片RTD发射器作为组件。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Resonant Tunnelling Diodes for next generation THz systems
Resonant tunnelling diodes (RTDs) are a strong candidate for future wireless communications in the THz spectrum (sub-millimetre waves), offering compact, room-temperature operation with the potential to exceed the bit transfer rate mandated by the 12G-SDI standard, using a single wireless link. A free-space RTD emitter operating at 353GHz is described. The fabrication process consists of a dual-pass I-line photolithography & etch technique using an air bridge, allowing low resistivity ohmic contacts, and accurate control of desired device area. With extrinsic circuit elements taken into account, the intrinsic semiconductor efficiency is analysed to investigate structural improvements for radiative efficiency. Such optimised structures are presented, and then characterised after being epitaxially grown with commercially viable metal-organic vapour phase epitaxy (MOVPE) reactors. A combination of low temperature photoluminescence spectroscopy, X-Ray diffractometry, and transmission electron microscopy attest the quality of the new material. We end with a suggestion for the next steps to exceed technological readiness levels of 8, and use monolithic RTD emitters as components in new systems.
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