二维六方氮化硼介质击穿的新物理学及其潜在应用

K. Pey, A. Ranjan, N. Raghavan, S. O’Shea
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引用次数: 0

摘要

六方氮化硼(h-BN)已成为实现石墨烯纳米电子学的理想介质材料之一。尽管许多性能优异的二维材料晶体管已经被证明,但关于h-BN作为二维纳米电子学栅极电介质的可靠性方面的见解非常有限。在这项工作中,我们回顾了传统(SiO2, HfO2)和新兴的2D (h-BN)电介质在降解和击穿方面的关键异同。重点介绍了氢氮化硼的一些新兴潜在应用。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
New Physics of Breakdown in 2D Hexagonal Boron Nitride Dielectrics and Its Potential Applications
Hexagonal boron nitride (h-BN) has emerged as one of the promising dielectric materials for the practical realization of graphene nanoelectronics. Although numerous stacks of outperforming 2D material-based transistors have already been demonstrated, very limited insights are available on the reliability aspects of h-BN as a gate dielectric for 2D nanoelectronics. In this work, we review the key similarities and differences in the degradation and breakdown of conventional (SiO2, HfO2) and emerging 2D (h-BN) dielectrics. Some of the key emerging potential applications of h-BN are also highlighted.
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