无掺杂CMOS电可重构双金属栅平面场效应晶体管的制备与仿真

Tillmann A. Krauss, Frank Wessely, U. Schwalke
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引用次数: 6

摘要

在本文中,我们通过模拟来说明和扩展我们之前的工作,并通过演示制作了具有双功功能金属栅极的静电掺杂可重构平面场效应晶体管器件。这种双门控通用场效应管的技术基础包括绝缘体上硅衬底上的肖特基S/D结。晶体管类型,即n型或p型FET,通过施加控制栅极电压可在操作中进行电选择,这大大增加了数字集成电路设计的通用性和灵活性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Fabrication and simulation of electrically reconfigurable dual metal-gate planar field-effect transistors for dopant-free CMOS
In this paper, we illustrate by simulation and extend our previous work by demonstration of fabricated devices of electrostatically doped, reconfigurable planar field-effect-transistors with dual work function metal gates. The technological cornerstones for this dual-gated general purpose FET contain Schottky S/D junctions on a silicon-on-insulator substrate. The transistor type, i.e. n-type or p-type FET, is electrically selectable in operation by applying a control-gate voltage which significantly increases the versatility and flexibility in the design of digital integrated circuits.
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