Yihua He, Guangda Yang, H. Fan, Chun F. Xu, Xuewen Wu
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1H NMR spectra were obtained for the Plasma-Enhanced Tetraethylorthosilicate (PETEOS) SiO2 film. The 1H spectra consisted of two components with different linewidths, being separated into a narrow Lorentzian and a broad Gaussian. The linewidths narrowed with increasing temperature.
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