采用纳米压印光刻技术制备具有横向耦合脊波导表面光栅的窄线宽894 nm分布反馈激光器

M. Dumitrescu, J. Telkkala, J. Karinen, A. Laakso, J. Viheriälä, T. Leinonen, J. Lyytikäinen, L. Toikkanen, M. Pessa
{"title":"采用纳米压印光刻技术制备具有横向耦合脊波导表面光栅的窄线宽894 nm分布反馈激光器","authors":"M. Dumitrescu, J. Telkkala, J. Karinen, A. Laakso, J. Viheriälä, T. Leinonen, J. Lyytikäinen, L. Toikkanen, M. Pessa","doi":"10.1109/SMICND.2010.5649034","DOIUrl":null,"url":null,"abstract":"The paper presents the modelling and design particularities of laterally-coupled distributed feedback lasers (LC-DFB), the fabrication process, involving a highly productive and cost-effective UV-nanoimprint lithography technique, and the characteristics obtained up to now for the LC-DFB lasers fabricated for pumping Cesium atomic clocks. 550 µm long LC-DFB lasers, emitting at 894 µm, had 10 mA threshold currents and maintained over 40dB side-mode-suppression-ratio between 10 and 100°C. The measured self-homodyne spectrum indicated a linewidth below 1.3 MHz for AR/HR-coated 1000 µm long LC-DFB lasers and the simulations indicate that the use of phase-shift sections could reduce the linewidth below 250 kHz.","PeriodicalId":377326,"journal":{"name":"CAS 2010 Proceedings (International Semiconductor Conference)","volume":"337 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-12-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Narrow linewidth 894 nm distributed feedback lasers with laterally-coupled ridge-waveguide surface gratings fabricated using nanoimprint lithography\",\"authors\":\"M. Dumitrescu, J. Telkkala, J. Karinen, A. Laakso, J. Viheriälä, T. Leinonen, J. Lyytikäinen, L. Toikkanen, M. Pessa\",\"doi\":\"10.1109/SMICND.2010.5649034\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The paper presents the modelling and design particularities of laterally-coupled distributed feedback lasers (LC-DFB), the fabrication process, involving a highly productive and cost-effective UV-nanoimprint lithography technique, and the characteristics obtained up to now for the LC-DFB lasers fabricated for pumping Cesium atomic clocks. 550 µm long LC-DFB lasers, emitting at 894 µm, had 10 mA threshold currents and maintained over 40dB side-mode-suppression-ratio between 10 and 100°C. The measured self-homodyne spectrum indicated a linewidth below 1.3 MHz for AR/HR-coated 1000 µm long LC-DFB lasers and the simulations indicate that the use of phase-shift sections could reduce the linewidth below 250 kHz.\",\"PeriodicalId\":377326,\"journal\":{\"name\":\"CAS 2010 Proceedings (International Semiconductor Conference)\",\"volume\":\"337 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2010-12-03\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"CAS 2010 Proceedings (International Semiconductor Conference)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SMICND.2010.5649034\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"CAS 2010 Proceedings (International Semiconductor Conference)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SMICND.2010.5649034","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1

摘要

本文介绍了侧向耦合分布反馈激光器(LC-DFB)的建模和设计特点,采用高效率和高性价比的紫外纳米压印光刻技术的制造过程,以及迄今为止用于泵送铯原子钟的LC-DFB激光器的特性。550µm长LC-DFB激光器,发射波长为894µm,阈值电流为10 mA,在10 ~ 100°C范围内保持超过40dB的侧模抑制比。测量的自同差谱表明,AR/ hr涂层的1000µm长LC-DFB激光器的线宽低于1.3 MHz,仿真表明,使用相移段可以将线宽降低到250 kHz以下。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Narrow linewidth 894 nm distributed feedback lasers with laterally-coupled ridge-waveguide surface gratings fabricated using nanoimprint lithography
The paper presents the modelling and design particularities of laterally-coupled distributed feedback lasers (LC-DFB), the fabrication process, involving a highly productive and cost-effective UV-nanoimprint lithography technique, and the characteristics obtained up to now for the LC-DFB lasers fabricated for pumping Cesium atomic clocks. 550 µm long LC-DFB lasers, emitting at 894 µm, had 10 mA threshold currents and maintained over 40dB side-mode-suppression-ratio between 10 and 100°C. The measured self-homodyne spectrum indicated a linewidth below 1.3 MHz for AR/HR-coated 1000 µm long LC-DFB lasers and the simulations indicate that the use of phase-shift sections could reduce the linewidth below 250 kHz.
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