分析電子顕微鏡による粘土鉱物の分析--装置メ-カ-の立場から (熱水変質作用と粘土鉱物の生成)

Analysis of clay minerals by means of an analytical electron microscope have been reviewed from a standpoint of manufacturer. At present, two types of energy dispersive spectrometer are available for an electron microscope. The elements from Na to U can be detected by the Be window type detector and those from C to U, by the ultra thin window (UTW) type detector. Moreover, quantitative chemical analysis of thin section specimen can be made with a considerable accuracy by the Cliff-Lorimer method. Experimental factors such as, acceleration of voltage, dead time of detector, incident electron beam current, damage of specimen by an incident electron beam and contamination of specimen, should be given greater attention to get a more reliable result.