加速试验方法的过程控制

Joseph E. Brodeur
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引用次数: 1

摘要

高温工作寿命测试提供了半导体晶圆制造过程的快速反馈。在这样的测试中,相对较高的故障率(所谓的)畸形很快就会被证明,并且可以表明一个边缘或失控的过程。这种过程控制方法集中于初始沉降,作为确定最终产品可靠性的一种手段。大于150°C的应力温度不应应用于塑料封装的设备。由于大多数环氧树脂的玻璃化转变温度在150°C到180°C之间,可能会对封装造成永久性损坏。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Process Control by Means of Accelerated Testing
High temperature operating life test gives quick feedback on the processes used in fabrication of semiconductor wafers. The relatively high failure rate of the (so-called) freaks is quickly demonstrated in such a test and can indicate a marginal or out of control process. This method of process control concentrates on the initial fallout as a means of determining the reliability of final products. Greater than 150°C stress temperatures should not be applied to plastic encapsulated devices. Since most epoxies have glass transition temperatures in the range of 150°C to 180°C permanent damage to the package could result.
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