{"title":"基于TED影响的MEMS DETF谐振器性能评估研究","authors":"Anshu Sharma, H. Kaur, Vijay Kumar, Vijay Kumar","doi":"10.1109/delcon57910.2023.10127470","DOIUrl":null,"url":null,"abstract":"A resonator is a key sensitive element in the micro-electro-mechanical system (MEMS) resonant sensors. The resonator which is the object of study in this paper is a variant of basic Double Ended Tuning Fork (DETF) resonator design. A DETF resonator operates best in 180° phase shift vibration mode. The study focuses on the geometric analysis of the proposed resonator to evaluate its performance in the presence of thermoelastic damping (TED). The impact of a certain geometric modification on quality factor, resonant frequency and damping is analyzed using FEA tool COMSOL. The proposed resonator design exhibits a resonant frequency of 2.08 MHz and a quality factor of 19228. The design has an advantage of enhanced performance with least stress, high resonant frequency, good quality factor and simple geometry.","PeriodicalId":193577,"journal":{"name":"2023 2nd Edition of IEEE Delhi Section Flagship Conference (DELCON)","volume":"73 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2023-02-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Study of MEMS DETF Resonator for Performance Evaluation Based on the Impact of TED\",\"authors\":\"Anshu Sharma, H. Kaur, Vijay Kumar, Vijay Kumar\",\"doi\":\"10.1109/delcon57910.2023.10127470\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A resonator is a key sensitive element in the micro-electro-mechanical system (MEMS) resonant sensors. The resonator which is the object of study in this paper is a variant of basic Double Ended Tuning Fork (DETF) resonator design. A DETF resonator operates best in 180° phase shift vibration mode. The study focuses on the geometric analysis of the proposed resonator to evaluate its performance in the presence of thermoelastic damping (TED). The impact of a certain geometric modification on quality factor, resonant frequency and damping is analyzed using FEA tool COMSOL. The proposed resonator design exhibits a resonant frequency of 2.08 MHz and a quality factor of 19228. The design has an advantage of enhanced performance with least stress, high resonant frequency, good quality factor and simple geometry.\",\"PeriodicalId\":193577,\"journal\":{\"name\":\"2023 2nd Edition of IEEE Delhi Section Flagship Conference (DELCON)\",\"volume\":\"73 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-02-24\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2023 2nd Edition of IEEE Delhi Section Flagship Conference (DELCON)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/delcon57910.2023.10127470\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2023 2nd Edition of IEEE Delhi Section Flagship Conference (DELCON)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/delcon57910.2023.10127470","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Study of MEMS DETF Resonator for Performance Evaluation Based on the Impact of TED
A resonator is a key sensitive element in the micro-electro-mechanical system (MEMS) resonant sensors. The resonator which is the object of study in this paper is a variant of basic Double Ended Tuning Fork (DETF) resonator design. A DETF resonator operates best in 180° phase shift vibration mode. The study focuses on the geometric analysis of the proposed resonator to evaluate its performance in the presence of thermoelastic damping (TED). The impact of a certain geometric modification on quality factor, resonant frequency and damping is analyzed using FEA tool COMSOL. The proposed resonator design exhibits a resonant frequency of 2.08 MHz and a quality factor of 19228. The design has an advantage of enhanced performance with least stress, high resonant frequency, good quality factor and simple geometry.
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