用于原子力显微镜应用的硅尖端软介电悬臂梁

Scientific Conference on Optical and Electronic Sensors Pub Date : 2016-11-10 DOI:10.1117/12.2244789

P. Janus, R. Dobrowolski, A. Sierakowski, F. Ivaldi, D. Szmigiel, J. Zajac

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引用次数: 0

摘要

本文介绍了软性二氧化硅AFM悬臂梁的设计、工艺和应用。新技术允许制造配备硅尖端的超软悬臂。对所研制的探针进行了力学性能测试，并最终应用于脆性样品的AFM测量。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Soft dielectric cantilevers with silicon tips for atomic force microscopy applications

In this paper authors present design, technology and application of soft silicon dioxide AFM cantilevers. Novel technology allows for manufacturing ultra-soft cantilevers equipped with silicon tip. Mechanical properties of developed probes were tested and finally applied in AFM measurements of fragile samples.

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Scientific Conference on Optical and Electronic Sensors

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