模拟光链路可调谐MSM PD的设计与制造

2015 IEEE Avionics and Vehicle Fiber-Optics and Photonics Conference (AVFOP) Pub Date : 2015-12-17 DOI:10.1109/AVFOP.2015.7356640

K. Komirisetty, N. Greene Z, D. Geddis

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引用次数: 0

摘要

基于氧化铟锡(ITO)的集成可调谐MSM PD在Si和InP上制造。调谐是通过使用镍铬(NiCr)微加热器热控制半导体的带隙来实现的。

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Design and fabrication of tunable MSM PD for analog optical links

An integrated tunable MSM PD based on Indium Tin Oxide (ITO) that is fabricated on Si and InP. Tuning is achieved by thermally controlling the bandgap of the semiconductor using a Nickel Chromium (NiCr) microheater.

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来源期刊

2015 IEEE Avionics and Vehicle Fiber-Optics and Photonics Conference (AVFOP)

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