利用共传播光涡旋干涉图样和上升过程制备精细金属结构

2017 22nd Microoptics Conference (MOC) Pub Date : 2017-11-01 DOI:10.23919/MOC.2017.8244547

M. Sakamoto, Takuya Hizatsuki, Kohei Noda, T. Sasaki, N. Kawatsuki, K. Goto, H. Ono

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引用次数: 0

摘要

为了制造精细的金属结构，我们提出并演示了一种利用共传播光涡旋干涉图样和升空过程的方法。在较低的数值孔径条件下，与传统的高斯光束激光拉丝方法相比，该方法可以制作出更精细的结构。

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Fabrication of fine metal structure by using interference pattern of copropagating optical vortices and lift-off process

To fabricate fine metal structure, we proposed and demonstrated a method by using interference pattern of copropagating optical vortices and lift-off process. This method can fabricate more fine structure compared with the conventional laser drawing method using Gaussian beam even if the low numerical aperture condition.

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来源期刊

2017 22nd Microoptics Conference (MOC)

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