Improvement of reconstructed phase distribution of fast moving phase object in digital holographic microscope

For defect detection or undesired object in commercial products, it is required to develop a fast measurement system that can obtain three-dimensional distribution of surface of the opaque medium such as metal or inside of the transparent medium. For this purpose, we fabricated a digital holographic microscope using a fast image sensor when the phase object is put on a fast movable stage. In the fabricated system, an image sensor operated at maximum frame rate of 2000 fps and a movable stage operated at maximum speed of 300 mm/s are introduced. Under the continuous wave illumination, motion-blurred phase object is reconstructed. By using numerical processing such as deconvolution filter, the reconstructed phase distribution is much improved. Numerical results are presented.