Design and implementation of radio frequency glow discharge system

Radio frequency glow discharge system is used for processing the fourth state of matter as called plasma in laboratory condition. Plasma state at room temperature is novel technique for biomedical applications especially in modification of sensor and different type of biomaterial surfaces to have proper functionality (improvement of hidrophilicity, hydrophobicity, tissue compability, blood compability etc.). In this study designs the parts of RF plasma system, RF generator, impedance matching and power source which will drive the 150 watt RF power amplifier are presented. This power which is produce by system, is applied on reference surface with the aid of electrodes. In this scope the power, which is get high frequency, is used for generating plasma at allowable value of inert gases and monomers on low pressure (10−3 Torr) and reference biomaterial surface will be modified homogeneously by this plasma generation.