{"title":"受kirigami启发的用于运动跟踪血流测量的电热执行器","authors":"M. Hashimoto, Y. Taguchi","doi":"10.1109/OMN.2019.8925034","DOIUrl":null,"url":null,"abstract":"A large stroke electrothermal MEMS actuator with small device footprint and low driving voltage has been proposed for motion tracking blood flow measurement. This paper reports this kirigami-inspired device design and simulation results of the proposed actuator.","PeriodicalId":353010,"journal":{"name":"2019 International Conference on Optical MEMS and Nanophotonics (OMN)","volume":"41 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Kirigami-inspired Electrothermal Actuator for Motion Tracking Blood Flow Measurement\",\"authors\":\"M. Hashimoto, Y. Taguchi\",\"doi\":\"10.1109/OMN.2019.8925034\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A large stroke electrothermal MEMS actuator with small device footprint and low driving voltage has been proposed for motion tracking blood flow measurement. This paper reports this kirigami-inspired device design and simulation results of the proposed actuator.\",\"PeriodicalId\":353010,\"journal\":{\"name\":\"2019 International Conference on Optical MEMS and Nanophotonics (OMN)\",\"volume\":\"41 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-07-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2019 International Conference on Optical MEMS and Nanophotonics (OMN)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/OMN.2019.8925034\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 International Conference on Optical MEMS and Nanophotonics (OMN)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMN.2019.8925034","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Kirigami-inspired Electrothermal Actuator for Motion Tracking Blood Flow Measurement
A large stroke electrothermal MEMS actuator with small device footprint and low driving voltage has been proposed for motion tracking blood flow measurement. This paper reports this kirigami-inspired device design and simulation results of the proposed actuator.