{"title":"光致抗蚀剂加工的模糊分析","authors":"R. Chang, Chern Sheng Lin, C. P. Hu","doi":"10.1364/oft.1992.wa14","DOIUrl":null,"url":null,"abstract":"Surface relief holograms have intrinsic nonlinearity. A very important step in fuzzy analysis of HOE fabricating process is to choice parameters from procedure for making photoresist hologram. We select some parameters for the reason we can’t fix it or control it in a economic process, and some parameters for the sake of compensation.","PeriodicalId":142307,"journal":{"name":"Optical Fabrication and Testing Workshop","volume":"34 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Fuzzy Analysis For Fabricating Hoe In Photoresist\",\"authors\":\"R. Chang, Chern Sheng Lin, C. P. Hu\",\"doi\":\"10.1364/oft.1992.wa14\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Surface relief holograms have intrinsic nonlinearity. A very important step in fuzzy analysis of HOE fabricating process is to choice parameters from procedure for making photoresist hologram. We select some parameters for the reason we can’t fix it or control it in a economic process, and some parameters for the sake of compensation.\",\"PeriodicalId\":142307,\"journal\":{\"name\":\"Optical Fabrication and Testing Workshop\",\"volume\":\"34 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1900-01-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Optical Fabrication and Testing Workshop\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1364/oft.1992.wa14\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optical Fabrication and Testing Workshop","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1364/oft.1992.wa14","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Surface relief holograms have intrinsic nonlinearity. A very important step in fuzzy analysis of HOE fabricating process is to choice parameters from procedure for making photoresist hologram. We select some parameters for the reason we can’t fix it or control it in a economic process, and some parameters for the sake of compensation.