光致抗蚀剂加工的模糊分析

R. Chang, Chern Sheng Lin, C. P. Hu
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引用次数: 1

摘要

表面浮雕全息图具有内在的非线性。光致抗蚀剂全息图制作工艺参数的选择是光致抗蚀剂全息图制作工艺模糊分析的一个重要步骤。我们选择一些参数是因为在经济过程中我们无法固定或控制它,而选择一些参数是为了补偿。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Fuzzy Analysis For Fabricating Hoe In Photoresist
Surface relief holograms have intrinsic nonlinearity. A very important step in fuzzy analysis of HOE fabricating process is to choice parameters from procedure for making photoresist hologram. We select some parameters for the reason we can’t fix it or control it in a economic process, and some parameters for the sake of compensation.
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