线圈设计对聚酰亚胺膜压力传感器传感性能的影响

Proceedings of the 2014 37th International Spring Seminar on Electronics Technology Pub Date : 2014-05-07 DOI:10.1109/ISSE.2014.6887637

M. Kisić, N. Blaz, A. Maric, G. Radosavljevic, L. Zivanov, M. Damnjanović

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引用次数: 2

摘要

本研究的目的是研究各种线圈的设计，并提出可以改善压力传感器性能的模式。设计、制作并测试了基于聚酰亚胺箔的无线压力传感器。所提出的传感器采用异质集成工艺实现，由PCB(印刷电路板)线圈、间隔片和聚酰亚胺膜和附着LTCC(低温共烧陶瓷)铁氧体组成。通过相位倾斜技术，在系统天线传感器谐振频率中无线检测压力变化。线圈和铁氧体之间的距离随着施加的外部压力和随后的膜偏转而变化，因此线圈的电感增加，系统的谐振频率降低。考察了不同匝数线圈设计对传感器性能的影响，并对传感器性能进行了比较。通过分析计算和模拟结果确定并证实了实验测量值。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Influence of coil design on sensing performance of pressure sensor with polyimide membrane

The objective of this research is to study various coil designs and to propose the pattern that can improve the performance of the pressure sensor. Wireless pressure sensor, based on polyimide foil, is designed, fabricated and tested. The proposed sensor is realised in heterogonous integration process and consists of PCB (Printed Circuit Board) coil, spacer and polyimide membrane with attached LTCC (Low Temperature Co-fired Ceramic) ferrite. Pressure variations are wirelessly detected in system antenna-sensor resonant frequency, by a phase-dip technique. The distance between the coil and the ferrite varies with an applied external pressure and consequently membrane deflection, so the inductance of the coil increases and the resonant frequency of the system decreases. The effect of coil designs with different number of turns is examined and sensor performances are compared. Experimental measurements are determined and confirmed by analytical calculations and simulated results.

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Proceedings of the 2014 37th International Spring Seminar on Electronics Technology

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