一个紧凑的两轴劳埃德镜干涉仪的尺度光栅制造

2018 IEEE International Conference on Advanced Manufacturing (ICAM) Pub Date : 2018-11-01 DOI:10.1109/AMCON.2018.8614804

Masanori Matsunaga, Kazuki Mano, H. Matsukuma, Y. Shimizu, W. Gao

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引用次数: 0

摘要

研制了一种用于制作紧凑尺寸的两轴衍射光栅的非正交两轴劳氏镜干涉仪。对改进后的干涉仪光学装置进行了设计研究，并进行了基础实验，验证了利用改进后的干涉仪单元制作单次曝光的两轴细衍射光栅的可能性。

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A compact two-axis Lloyd’s mirror interferometer for scale grating fabrication

A non-orthogonal two-axis Lloyd's mirror interferometer for fabrication of a two-axis diffraction grating designed in a compact size is developed. A design study of the modified optical setup for the interferometer and the results of basic experiments with the developed optical setup are carried out to verify the possibility of fabricating the two-axis fine diffraction grating with a single exposure by the developed interferometer unit.

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2018 IEEE International Conference on Advanced Manufacturing (ICAM)

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