脉冲激光沉积铋薄膜上LIPSS形成的研究

A. Reyes-Contreras, M. A. C. López, L. Romero‐Salazar, E. Camps
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引用次数: 1

摘要

本文报道了用脉冲激光沉积法在玻璃衬底上制备铋薄膜。利用Nd:YAG激光(9 ns, 10 Hz, 1064和532 nm)的聚焦光束对高纯度铋靶进行烧蚀。每脉冲激光通量在0.95和1.35 J/cm2之间变化,取决于所使用的激光波长。采用扫描电镜(SEM)和x射线衍射仪(XRD)对镀层表面形貌和晶体结构进行表征。扫描电镜显示粗糙度的差异,随激光波长的增加而增加。衍射图显示,根据等离子体离子的平均动能不同,形成了多晶或择优取向的铋薄膜。用低于烧蚀阈值的低能量非聚焦激光束照射as沉积的铋薄膜。在激光处理区域,可以观察到周期性结构的形成,称为LIPSS(激光诱导周期性表面结构)。根据辐照膜的晶体结构,形成的LIPSS具有不同的宽度和形状等特征。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Study of LIPSS formation on bismuth thin films deposited by Pulsed Laser Deposition
In this work, we report the fabrication of bismuth thin films on glass substrates by Pulsed Laser Deposition. A focused beam of a Nd:YAG laser (9 ns, 10 Hz, 1064 and 532 nm) was utilized to carry out the ablation of a high purity Bi target. The per pulse laser fluence was varied between 0.95 and 1.35 J/cm2, depending on the laser wavelength used. The deposits were characterized by SEM and XRD to analyze the surface morphology of thin films and their crystalline structure, respectively. The SEM micrographs showed differences in roughness, which increased with the laser wavelength. The diffractograms revealed the formation of Bi thin films with a polycrystalline structure or with a preferential orientation, depending on the mean kinetic energy of the plasma ions. The as deposited bismuth thin films were irradiated with a non-focused laser beam at low energies below the ablation threshold. In the laser treated area, it could be observed the formation of periodic structures, known as LIPSS (laser induced periodic surface structures). Depending on the crystallographic structure of the irradiated film, the formed LIPSS showed different characteristics, such as width and shape.
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