在RIE蚀刻硅上制备锥体聚四氟乙烯薄膜获得超疏水表面

The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems Pub Date : 2013-04-07 DOI:10.1109/NEMS.2013.6559869

C. Baek, Litao Yao, S. Seo, Hwa-Min Kim, D. Pyo, Pyo-Hwan Hong, Jung-Hwa Oh, D. Kong, Chanseob Cho, Jong-Hyun Lee, In-Yong Eom, Bonghwan Kim

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引用次数: 1

摘要

我们开发了一种表面纹理工艺，使用具有锥体结构的聚四氟乙烯涂层来获得超疏水表面。为了研究表面的疏水性，我们测量了接触角和粗糙度值。计算得到的粗糙度系数和均方根粗糙度分别在2.47 ~ 2.6和0.25 ~ 0.4 μm之间。水滴与表面的接触角大于150°;而且，这个角度保持了7周以上。这一观察结果表明，在超疏水表面上可以实现极低的润湿性。

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Superhydrophobic surface obtained using pyramidal PTFE film fabricated on RIE etched silicon

We have developed a surface texturing process using a polytetrafluoroethylene coating with a pyramidal structure for obtaining superhydrophobic surfaces. In order to investigate the hydrophobic properties of the surface, we measured the contact angle and roughness values. The calculated roughness factor and root mean square roughness ranged from 2.47 to 2.6 and from 0.25 μm to 0.4 μm, respectively. The contact angle of a water droplet on the surface was greater than 150°; moreover, this angle was maintained for over 7 weeks. This observation implies that extremely low wettability is achievable on superhydrophobic surfaces.

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The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems

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