光刻用新型同心绕组同步平面永磁电机的研究

2015 IEEE Magnetics Conference (INTERMAG) Pub Date : 2015-05-11 DOI:10.1109/INTMAG.2015.7157804

L. Zhang, B. Kou, F. Xing, Y. Jin

{"title":"光刻用新型同心绕组同步平面永磁电机的研究","authors":"L. Zhang, B. Kou, F. Xing, Y. Jin","doi":"10.1109/INTMAG.2015.7157804","DOIUrl":null,"url":null,"abstract":"A novel synchronous permanent magnet planar motor (SPMPM) which with concentric structure winding is investigated in this paper. Topology of this SPMPM is introduced, and as the mover can move freely on the stator, the planar motor is suitable for long-stroke applications in the lithography. Flux density, electromagnetic thrust and back-EMF of the SPMPM are obtained analytically and compared with the finite element simulation results. A prototype is manufactured and tested successfully. The measured values matching the simulated ones well.","PeriodicalId":381832,"journal":{"name":"2015 IEEE Magnetics Conference (INTERMAG)","volume":"39 5 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-05-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Research on a novel synchronous permanent magnet planar motor with concentric winding for lithography\",\"authors\":\"L. Zhang, B. Kou, F. Xing, Y. Jin\",\"doi\":\"10.1109/INTMAG.2015.7157804\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A novel synchronous permanent magnet planar motor (SPMPM) which with concentric structure winding is investigated in this paper. Topology of this SPMPM is introduced, and as the mover can move freely on the stator, the planar motor is suitable for long-stroke applications in the lithography. Flux density, electromagnetic thrust and back-EMF of the SPMPM are obtained analytically and compared with the finite element simulation results. A prototype is manufactured and tested successfully. The measured values matching the simulated ones well.\",\"PeriodicalId\":381832,\"journal\":{\"name\":\"2015 IEEE Magnetics Conference (INTERMAG)\",\"volume\":\"39 5 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-05-11\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2015 IEEE Magnetics Conference (INTERMAG)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/INTMAG.2015.7157804\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 IEEE Magnetics Conference (INTERMAG)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/INTMAG.2015.7157804","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

本文研究了一种新型同心结构绕组同步永磁平面电机。介绍了该平面电机的拓扑结构，由于其电机在定子上可以自由移动，因此适合于长行程的光刻应用。对SPMPM的磁通密度、电磁推力和反电动势进行了分析，并与有限元仿真结果进行了比较。样机已成功制造并进行了测试。实测值与模拟值吻合较好。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Research on a novel synchronous permanent magnet planar motor with concentric winding for lithography

A novel synchronous permanent magnet planar motor (SPMPM) which with concentric structure winding is investigated in this paper. Topology of this SPMPM is introduced, and as the mover can move freely on the stator, the planar motor is suitable for long-stroke applications in the lithography. Flux density, electromagnetic thrust and back-EMF of the SPMPM are obtained analytically and compared with the finite element simulation results. A prototype is manufactured and tested successfully. The measured values matching the simulated ones well.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

2015 IEEE Magnetics Conference (INTERMAG)

自引率

0.00%

发文量