{"title":"利用磁场和电场控制烧蚀","authors":"J. Maksimovic, T. Katkus, S. Ng, S. Juodkazis","doi":"10.1117/12.2541090","DOIUrl":null,"url":null,"abstract":"Laser fabrication with ultra-short laser pulses (sub-1 ps) have the ability for precise energy delivery to target materials for ablation, spallation or polymerisation down to sub-wavelength resolution. We show, that by applying electrical and magnetic fields, the electron-ion ablation plasma can be controlled following the Lorentz force exerted on to the plasma F = eE + e[v ×B], where v is velocity of charge e, E is the applied electrical bias and B is the magnetic flux density. The vectorial nature of the Lorentz force was investigated using the ablation of silicon. The application potential for ablation debris control and mass, charge spectroscopes of ablated materials is discussed.","PeriodicalId":131350,"journal":{"name":"Micro + Nano Materials, Devices, and Applications","volume":"67 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-12-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Ablation control by applying magnetic and electric fields\",\"authors\":\"J. Maksimovic, T. Katkus, S. Ng, S. Juodkazis\",\"doi\":\"10.1117/12.2541090\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Laser fabrication with ultra-short laser pulses (sub-1 ps) have the ability for precise energy delivery to target materials for ablation, spallation or polymerisation down to sub-wavelength resolution. We show, that by applying electrical and magnetic fields, the electron-ion ablation plasma can be controlled following the Lorentz force exerted on to the plasma F = eE + e[v ×B], where v is velocity of charge e, E is the applied electrical bias and B is the magnetic flux density. The vectorial nature of the Lorentz force was investigated using the ablation of silicon. The application potential for ablation debris control and mass, charge spectroscopes of ablated materials is discussed.\",\"PeriodicalId\":131350,\"journal\":{\"name\":\"Micro + Nano Materials, Devices, and Applications\",\"volume\":\"67 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-12-31\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Micro + Nano Materials, Devices, and Applications\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.2541090\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Micro + Nano Materials, Devices, and Applications","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.2541090","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
摘要
使用超短激光脉冲(低于1ps)的激光制造能够精确地将能量输送到靶材料,以进行烧蚀,散裂或聚合,达到亚波长分辨率。我们表明,通过施加电场和磁场,电子-离子烧蚀等离子体可以按照施加在等离子体上的洛伦兹力F = eE + e[v ×B]来控制,其中v是电荷e的速度,e是施加的电偏压,B是磁通量密度。利用硅的烧蚀研究了洛伦兹力的矢量性质。讨论了烧蚀碎屑控制和烧蚀材料质量、电荷谱的应用前景。
Ablation control by applying magnetic and electric fields
Laser fabrication with ultra-short laser pulses (sub-1 ps) have the ability for precise energy delivery to target materials for ablation, spallation or polymerisation down to sub-wavelength resolution. We show, that by applying electrical and magnetic fields, the electron-ion ablation plasma can be controlled following the Lorentz force exerted on to the plasma F = eE + e[v ×B], where v is velocity of charge e, E is the applied electrical bias and B is the magnetic flux density. The vectorial nature of the Lorentz force was investigated using the ablation of silicon. The application potential for ablation debris control and mass, charge spectroscopes of ablated materials is discussed.