DBD准分子灯电源，工作条件完全可控

2012 13th International Conference on Optimization of Electrical and Electronic Equipment (OPTIM) Pub Date : 2012-05-24 DOI:10.1109/OPTIM.2012.6231836

D. Florez, R. Díez, K. Hay, H. Piquet

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引用次数: 10

摘要

基于介电阻挡放电(DBD)准分子灯的容性特性，在因果分析的基础上，设计并实现了一种允许注入KrCl准分子灯的功率变化的转换器。该变换器能够通过三个自由度(D.O.F.)的一个方形:幅度，占空比和频率来控制灯电流。它是为研究DBD灯的紫外线辐射而设计的;在此基础上，给出并分析了在这三种点距不同组合下DBD激光放大器的紫外功率测量结果。

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DBD excimer lamp power supply with fully controlled operating conditions

Based on causality analysis relying on the capacitive nature of the Dielectric Barrier Discharge (DBD) excimer lamps, a converter that allows the variation of the electrical power injected to a KrCl excimer lamp is designed and implemented. This converter is capable of controlling the lamp current by means of the three degrees of freedom (D.O.F.) of a square shape: amplitude, duty cycle and frequency. It has been conceived for the study of the UV radiation of DBD lamps; consequently, the UV power measurements for the DBD excilamp under different combinations of these three D.O.F., are presented and analyzed.

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2012 13th International Conference on Optimization of Electrical and Electronic Equipment (OPTIM)

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