{"title":"用于绝缘体上硅波导的高效均匀渐变蚀刻光栅耦合器的设计","authors":"Huai-Yi Chen, Shancheng Xu, Kai-Chun Yang","doi":"10.1109/SOPO.2012.6271056","DOIUrl":null,"url":null,"abstract":"A high efficiency \"uniform\" grating coupler with gradually etched grooves was designed on a silicon-on-insulator substrate without experimental demonstration. For TE polarized coupling of an optical fiber at the wavelength of 1.55 μm, the fiber coupling efficiency of our grating coupler is 81%, output coupling angle is 8 degrees and 1dB spectral bandwidth is 80 nm. This performance is superior to the traditional uniform grating coupler without gradually etched grooves. Besides, our high efficiency broadband grating coupler is much easier to design than the already proposed \"non-uniform\" grating coupler fabricated using the lag effect of dry etching.","PeriodicalId":159850,"journal":{"name":"2012 Symposium on Photonics and Optoelectronics","volume":"2 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-05-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Design of a Highly Efficient Uniform Grating Coupler with Gradually Etched Grooves for Silicon-on-Insulator Waveguides\",\"authors\":\"Huai-Yi Chen, Shancheng Xu, Kai-Chun Yang\",\"doi\":\"10.1109/SOPO.2012.6271056\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A high efficiency \\\"uniform\\\" grating coupler with gradually etched grooves was designed on a silicon-on-insulator substrate without experimental demonstration. For TE polarized coupling of an optical fiber at the wavelength of 1.55 μm, the fiber coupling efficiency of our grating coupler is 81%, output coupling angle is 8 degrees and 1dB spectral bandwidth is 80 nm. This performance is superior to the traditional uniform grating coupler without gradually etched grooves. Besides, our high efficiency broadband grating coupler is much easier to design than the already proposed \\\"non-uniform\\\" grating coupler fabricated using the lag effect of dry etching.\",\"PeriodicalId\":159850,\"journal\":{\"name\":\"2012 Symposium on Photonics and Optoelectronics\",\"volume\":\"2 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2012-05-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2012 Symposium on Photonics and Optoelectronics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SOPO.2012.6271056\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 Symposium on Photonics and Optoelectronics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SOPO.2012.6271056","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Design of a Highly Efficient Uniform Grating Coupler with Gradually Etched Grooves for Silicon-on-Insulator Waveguides
A high efficiency "uniform" grating coupler with gradually etched grooves was designed on a silicon-on-insulator substrate without experimental demonstration. For TE polarized coupling of an optical fiber at the wavelength of 1.55 μm, the fiber coupling efficiency of our grating coupler is 81%, output coupling angle is 8 degrees and 1dB spectral bandwidth is 80 nm. This performance is superior to the traditional uniform grating coupler without gradually etched grooves. Besides, our high efficiency broadband grating coupler is much easier to design than the already proposed "non-uniform" grating coupler fabricated using the lag effect of dry etching.
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
