金属远红外滤光片的制备

Jared E. Payne, Joseph Eddy, Hunter Stevenson, Brad Ferguson, Ryan T. Beazer, G. Nielson, S. Schultz
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引用次数: 2

摘要

远红外滤光片是通过在电介质衬底上创建金属正方形来制造的。该电容式金属滤波器采用飞秒激光器与高数值孔径物镜相结合的直写激光烧蚀技术制备。在钠玻璃基板上制备了具有代表性的周期为100 μm、分离宽度为30 μm的电容滤波器。在相似尺寸的聚乙烯薄膜衬底上制备了部分电容滤波器。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Fabrication of Metallic Far-Infrared Filters
A far-infrared filter is fabricated by creating metallic squares on a dielectric substrate. This capacitive metallic filter is fabricated using direct write laser ablation consisting of a femtosecond laser in combination with a high numerical aperture objective. A representative capacitive filter is fabricated on sodalime glass substrate with a period of 100 μm and separation width of 30 μm. A partial capacitive filter was also fabricated on a thin film polyethylene substrate with similar dimensions.
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