Al-Cu- Al-Cu- si和Ag导体电迁移寿命的宽度依赖性

13th International Reliability Physics Symposium Pub Date : 1975-04-01 DOI:10.1109/IRPS.1975.362689

G. A. Scoggan, B. Agarwala, P. Peressini, A. Brouillard

{"title":"Al-Cu- Al-Cu- si和Ag导体电迁移寿命的宽度依赖性","authors":"G. A. Scoggan, B. Agarwala, P. Peressini, A. Brouillard","doi":"10.1109/IRPS.1975.362689","DOIUrl":null,"url":null,"abstract":"The electromigration lifetimes of thin-film Al-Cu, Al-Cu-Si, and Ag conductors were measured as a function of stripe width. Both the median lifetime and the standard deviation of the lognormal failure distribution were observed to depend strongly on the stripe width; this finding indicates that a narrower stripe is less reliable. This width dependence is interpreted in terms of the microstructural characteristics of the films.","PeriodicalId":369161,"journal":{"name":"13th International Reliability Physics Symposium","volume":"44 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1975-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":"{\"title\":\"Width Dependence of Electromigration Life in Al-Cu Al-Cu-Si, and Ag Conductors\",\"authors\":\"G. A. Scoggan, B. Agarwala, P. Peressini, A. Brouillard\",\"doi\":\"10.1109/IRPS.1975.362689\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The electromigration lifetimes of thin-film Al-Cu, Al-Cu-Si, and Ag conductors were measured as a function of stripe width. Both the median lifetime and the standard deviation of the lognormal failure distribution were observed to depend strongly on the stripe width; this finding indicates that a narrower stripe is less reliable. This width dependence is interpreted in terms of the microstructural characteristics of the films.\",\"PeriodicalId\":369161,\"journal\":{\"name\":\"13th International Reliability Physics Symposium\",\"volume\":\"44 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1975-04-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"7\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"13th International Reliability Physics Symposium\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IRPS.1975.362689\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"13th International Reliability Physics Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IRPS.1975.362689","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 7

摘要

测量了Al-Cu、Al-Cu- si和Ag薄膜导体的电迁移寿命与条纹宽度的关系。中位寿命和对数正态失效分布的标准偏差与条纹宽度密切相关;这一发现表明，较窄的条纹不太可靠。这种宽度依赖性是根据薄膜的微观结构特征来解释的。

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Width Dependence of Electromigration Life in Al-Cu Al-Cu-Si, and Ag Conductors

The electromigration lifetimes of thin-film Al-Cu, Al-Cu-Si, and Ag conductors were measured as a function of stripe width. Both the median lifetime and the standard deviation of the lognormal failure distribution were observed to depend strongly on the stripe width; this finding indicates that a narrower stripe is less reliable. This width dependence is interpreted in terms of the microstructural characteristics of the films.

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13th International Reliability Physics Symposium

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