甲烷等离子体处理碳表面的表征

A. Deslandes, M. Jasieniak, M. Ionescu, J. Shapter, J. Quinton
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引用次数: 0

摘要

利用飞行时间二次离子质谱法(ToF-SIMS)研究了甲烷等离子体处理石墨表面的化学性质。主成分分析(PCA)应用于SIMS数据,揭示了表面的化学变化,特别是氢化程度。观察到HOPG表面的氢含量随着等离子体处理功率的系统增加而增加。这些结果得到了弹性反冲检测分析(ERDA)测量结果的支持,该结果显示氢含量也有类似的增加。扫描隧道显微镜(STM)通过研究等离子体产生的特征,观察到随着等离子体功率的增加,覆盖范围增加,从而可以深入了解处理引起的表面形态变化。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Characterisation of methane plasma treated carbon surfaces
Time of Flight Secondary Ion Mass Spectrometry (ToF-SIMS) was used to investigate the chemical nature of methane plasma treated graphite surfaces. Principle Component Analysis (PCA) was applied to the SIMS data, revealing chemical changes to the surfaces, in particular the extent of hydrogenation. The hydrogen content of the HOPG surface is observed to increase with systematic increases in power of the plasma treatment. These results are supported by Elastic Recoil Detection Analysis (ERDA) measurements that show a similar increase in hydrogen content. Scanning Tunneling Microscopy (STM) measurements provide insight into the morphological changes to the surface caused by the treatment, via investigating plasma-created features that are observed to increase in coverage with the increases in plasma power.
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