{"title":"抗振动、长期稳定、低噪声的同步大质量MEMS陀螺仪","authors":"I. Prikhodko, J. Geen, Carey Merritt, Sam Zhang","doi":"10.1109/INERTIAL51137.2021.9430483","DOIUrl":null,"url":null,"abstract":"The paper describes a small size (2.25 mm2active sensor area) yaw rate sensor component for ADIS1654x series Inertial Measurement Units (IMUs) with notable performance parameters such as in-run bias instability of 0.55 °/hr stable over 3 months on Allan Deviation, g-sensitivity of 0.8 (°/hr)/g, bias repeatability of 50 °/hr in 10 years, and no observable startup drift from a cold-start. The current generation IMU offers improvement of bias improvement by 4x, g-sensitivity by 30x, and repeatability by 10x over previous generation ADI's IMU.","PeriodicalId":424028,"journal":{"name":"2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"437 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-03-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Vibration Immune, Long-Term Stable and Low Noise Synchronized Mass MEMS Gyroscope\",\"authors\":\"I. Prikhodko, J. Geen, Carey Merritt, Sam Zhang\",\"doi\":\"10.1109/INERTIAL51137.2021.9430483\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The paper describes a small size (2.25 mm2active sensor area) yaw rate sensor component for ADIS1654x series Inertial Measurement Units (IMUs) with notable performance parameters such as in-run bias instability of 0.55 °/hr stable over 3 months on Allan Deviation, g-sensitivity of 0.8 (°/hr)/g, bias repeatability of 50 °/hr in 10 years, and no observable startup drift from a cold-start. The current generation IMU offers improvement of bias improvement by 4x, g-sensitivity by 30x, and repeatability by 10x over previous generation ADI's IMU.\",\"PeriodicalId\":424028,\"journal\":{\"name\":\"2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)\",\"volume\":\"437 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-03-22\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/INERTIAL51137.2021.9430483\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/INERTIAL51137.2021.9430483","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Vibration Immune, Long-Term Stable and Low Noise Synchronized Mass MEMS Gyroscope
The paper describes a small size (2.25 mm2active sensor area) yaw rate sensor component for ADIS1654x series Inertial Measurement Units (IMUs) with notable performance parameters such as in-run bias instability of 0.55 °/hr stable over 3 months on Allan Deviation, g-sensitivity of 0.8 (°/hr)/g, bias repeatability of 50 °/hr in 10 years, and no observable startup drift from a cold-start. The current generation IMU offers improvement of bias improvement by 4x, g-sensitivity by 30x, and repeatability by 10x over previous generation ADI's IMU.
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