先进FinFET技术中超速ESD电源箝位制程致高漏问题的研究

2020 International EOS/ESD Symposium on Design and System (IEDS) Pub Date : 2021-06-23 DOI:10.23919/IEDS48938.2021.9468849

Guangyi Lu, Lihui Wang, Ling Wang, Xin Gao, Mei Li

{"title":"先进FinFET技术中超速ESD电源箝位制程致高漏问题的研究","authors":"Guangyi Lu, Lihui Wang, Ling Wang, Xin Gao, Mei Li","doi":"10.23919/IEDS48938.2021.9468849","DOIUrl":null,"url":null,"abstract":"Fabrication-induced high-leakage issue of an overdrive ESD power clamp is presented. With silicon data exhibiting abnormal results, elaborate troubleshooting is performed and disclosed in this paper. Through alignments of silicon data and presumptive simulation results, fabrication-induced root cause is successfully revealed and confirmed by physical failure analysis (PFA) results.","PeriodicalId":174954,"journal":{"name":"2020 International EOS/ESD Symposium on Design and System (IEDS)","volume":"74 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Investigation on Fabrication-induced High-leakage Issue of an Overdrive ESD Power Clamp in Advanced FinFET Technology\",\"authors\":\"Guangyi Lu, Lihui Wang, Ling Wang, Xin Gao, Mei Li\",\"doi\":\"10.23919/IEDS48938.2021.9468849\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Fabrication-induced high-leakage issue of an overdrive ESD power clamp is presented. With silicon data exhibiting abnormal results, elaborate troubleshooting is performed and disclosed in this paper. Through alignments of silicon data and presumptive simulation results, fabrication-induced root cause is successfully revealed and confirmed by physical failure analysis (PFA) results.\",\"PeriodicalId\":174954,\"journal\":{\"name\":\"2020 International EOS/ESD Symposium on Design and System (IEDS)\",\"volume\":\"74 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-06-23\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2020 International EOS/ESD Symposium on Design and System (IEDS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.23919/IEDS48938.2021.9468849\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2020 International EOS/ESD Symposium on Design and System (IEDS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.23919/IEDS48938.2021.9468849","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

提出了一种超速ESD电源钳的高漏电问题。在硅数据显示异常结果的情况下，进行了详细的故障排除并公开了本文。通过对硅数据和假定模拟结果的比对，成功地揭示了制造引起的根本原因，并通过物理失效分析(PFA)结果确定了原因。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Investigation on Fabrication-induced High-leakage Issue of an Overdrive ESD Power Clamp in Advanced FinFET Technology

Fabrication-induced high-leakage issue of an overdrive ESD power clamp is presented. With silicon data exhibiting abnormal results, elaborate troubleshooting is performed and disclosed in this paper. Through alignments of silicon data and presumptive simulation results, fabrication-induced root cause is successfully revealed and confirmed by physical failure analysis (PFA) results.

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来源期刊

2020 International EOS/ESD Symposium on Design and System (IEDS)

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