采用可调程差光源的线场白光干涉测量

Imaging and Applied Optics Congress 2022 (3D, AOA, COSI, ISA, pcAOP) Pub Date : 1900-01-01 DOI:10.1364/isa.2022.ith4d.2

Jaeheung Kim, Nguyen Thanh Phong Truong, J. Oh, Chang-Seok Kim

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引用次数: 0

摘要

我们提出线场白光干涉测量使用可调程差源，提高成像性能。该系统通过同时采集沿线信号，具有较高的成像速度和稳定性，可实现大视场成像。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Line-field white light interferometry using tunable-path-difference source

We propose line-field white light interferometry using a tunable-path-difference source, improving imaging performance. By simultaneously acquiring signals along the line, the system has higher imaging speed and stability for a wide field of view imaging.

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Imaging and Applied Optics Congress 2022 (3D, AOA, COSI, ISA, pcAOP)

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