一种原始的无源器件,用于晶圆上噪声参数测量验证

A. Boudiaf, C. Dubon-Chevallier, D. Pasquet
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引用次数: 0

摘要

利用薄膜技术,我们设计并制造了一种新的无源器件,用于晶圆上噪声参数的测量验证。该器件的主要特点是输入输出反射系数和噪声参数与低噪声MESFET或HEMT晶体管具有相同的数量级。这种新器件是理想的验证标准,并且由于其小尺寸和宽操作带宽而适合于晶圆上测量。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
An original passive device for on-wafer noise parameter measurement verification
Using a thin film technology, we have designed and fabricated a new passive device for on-wafer noise parameter measurement verification. The main feature specifying this device is the same order of magnitude for input-output reflection coefficients and for noise parameters, as for low noise MESFET or HEMT transistors. This new device is ideal as a verification standard, and suited for on-wafer measurements due to its small size and wide operation bandwidth.<>
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