光学元件平面镀膜工艺研究

International Conference on Photonics and Optical Engineering and the Annual West China Photonics Conference Pub Date : 2021-01-15 DOI:10.1117/12.2581905

N. Pei, Dasen Wang, F. Nie, Xiaojing Li, H. Guo, Xu Zhang, Chaoxiang Xia

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引用次数: 0

摘要

为解决430mm×430mm光学元件加工过程中涂层不均匀、边缘涂层、涂层缺陷严重等问题，分析了表面粗糙度数据采集的基本要求，介绍了电感式传感器在表面粗糙度检测中的应用。光学元件展平层的涂层及流向机理，展平层材料的选择，以及材料特性和光学元件展平层沉积工艺的研究，实现光学元件的均匀涂层，减少涂层缺陷，满足下道工序抛光的要求

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Research on process of optical elements coating planar layer

In order to solve the problems of no uniform coating, edge coating, and severe coating defects in the process when processing 430mm×430mm optical components, The basic requirements of surface roughness data acquisition are analyzed and the application of inductive sensor in surface roughness is introduced. Optical element flattening layer coating and flow direction mechanisms, flattening layer material selection, and research on material characteristics and optical element planarization layer deposition process, achieving uniform coating of optical elements, reducing coating defects, and meeting the requirements of the next process polishing

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International Conference on Photonics and Optical Engineering and the Annual West China Photonics Conference

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